Design and Characterization of a High Vacuum Metals Deposition System based on Electron Beam Evaporation

 

محفوظ في:
التفاصيل البيبلوغرافية
المؤلفون: Ramírez Porras, Arturo, Avendaño Soto, Esteban Damián, Araya Pochet, José
التنسيق: presentación de congreso
تاريخ النشر:2010
الوصف:We describe a high vacuum metals deposition system based ona variation of a pendant-drop type electron beam evaporator.This system uses a Molybdenum crucible as an evaporantinstead of a rod or wire usually used in ultrathin filmsgrowing systems. The advantage of this setup is that it canevaporate different metals with a power delivered to thecrucible of around 100 W in optimum operation mode. X-Raysfluorescence test performed on the so-obtained thin films showno crucible material contamination traces, a very importantpoint in surface science technology.
البلد:Kérwá
المؤسسة:Universidad de Costa Rica
Repositorio:Kérwá
OAI Identifier:oai:kerwa.ucr.ac.cr:10669/328
الوصول للمادة أونلاين:https://hdl.handle.net/10669/328
كلمة مفتاحية:Sistema de alto vacío
Depositación de materiales por evaporación