Design and Characterization of a High Vacuum Metals Deposition System based on Electron Beam Evaporation
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| Autores: | , , |
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| 格式: | presentación de congreso |
| Fecha de Publicación: | 2010 |
| 實物特徵: | We describe a high vacuum metals deposition system based ona variation of a pendant-drop type electron beam evaporator.This system uses a Molybdenum crucible as an evaporantinstead of a rod or wire usually used in ultrathin filmsgrowing systems. The advantage of this setup is that it canevaporate different metals with a power delivered to thecrucible of around 100 W in optimum operation mode. X-Raysfluorescence test performed on the so-obtained thin films showno crucible material contamination traces, a very importantpoint in surface science technology. |
| País: | Kérwá |
| 機構: | Universidad de Costa Rica |
| Repositorio: | Kérwá |
| OAI Identifier: | oai:kerwa.ucr.ac.cr:10669/328 |
| 在線閱讀: | https://hdl.handle.net/10669/328 |
| Palabra clave: | Sistema de alto vacío Depositación de materiales por evaporación |